Investigation of TF-FinFET Based Biosensor for Early Diagnosis of Protein Carrying Diseases

This article deals with a comprehensive study of a FinFET based biosensor conducted on Atlas Silvaco TCAD software at 20 nm node. The implementation of a label free biosensor has been studied on the conventional as well as the truncated fin (TF) FinFET structure for early diagnosis of harmful diseases. A nanocavity introduced between gate metal and gate oxide induces an extra capacitance on immobilization of biomolecule, which ultimately alters device transfer characteristics. TF-FinFET found relatively higher switching ratio (i.e., 80 times) and lower OFF-state current (i.e., 10 times) and high sensitivity for each analyzed k-value. Hence, TF-FinFET proved itself a better candidate than conventional FinFET. Moreover, further analysis of analog FOMs have been done for TF-FinFET as an evidence of enhancement. Early diagnosis of protein carrying diseases like ovarian cancer, Alzheimer’s disease and coronary artery disease are possible with the help of TF-FinFET based biosensor.