Design Of A Parallel Linear Platform Based On Piezoelectric Inertial Drive Mechanism

This paper presents a new parallel linear platform based on piezoelectric inertial drive Mechanism. The platform is mainly consisted of a central basic body, an outer inertial frame, and four flexible amplifying mechanisms with piezoelectric stack actuators. First, according to the principle of conventional PIDM, mechanical structure and working principle of the two-dimensional parallel linear platform are described. The displacement of the platform is significantly increased with the symmetric flexible amplifying mechanism. Then, finite element analyses are carried out to confirm the ability of the platform with static and dynamic simulations of the structure. Finally, a prototype platform is manufactured and tested. Fundamental experiments are implemented to evaluate the basic performances of the proposed platform.