The Powerful Methods of Flicker Noise Improvement in 22nm Technology

How to reduce flicker noise is a public topic and expectable challenge as technique development. In this paper, we focus on four methods to improve flicker noise performance in 22nm technology. 50% ~ 80% flicker noise reduction benefits can be obtained by various FEoL process implementation and BEoL process optimization. The improvement is mainly attributed to the passivation of dielectric material and interface state, the reduction of process-induced-GOI degradation, and channel engineering to reduce scattering coefficient.