Auto Chamber Validation

This paper presents an automated solution to validate a chamber (compartment within tools where wafers are processed) to handle production wafers as they are restricted from processing them after a maintenance procedure (for quality reasons). This is important because an automated solution will minimize time invested by engineers in validating manually. Additionally, an automated solution will be error free and consume less time, thereby opening up the chamber for production wafers sooner. This in turn, will have a positive impact on tool throughput.