600 µdps / √Hz, 1.2 mm2 MEMS Pitch Gyroscope

The paper presents a miniaturized pitch/roll gyroscope with the lowest angle random walk (ARW of 600 μdps/√Hz) and lowest bias instability (BI of 2.8 dph) ever recorded on planar MEMS sensors for in-plane rate capture. The device is based on NEMS resistive sensing, features a 1.2 mm2 footprint, a 100-Hz bandwidth, and can be combined to yaw gyroscopes for ultra-low-noise 3-axis systems. The key advancement over previous implementations is represented by a 10-fold increase in the scale factor, obtained through a novel architecture which, combined with quadrature compensation, optimizes at the same time the energy transfer to the NEMS gauges and the robustness to vibrations.