Fabrication and Research of MSM UV Detectors with Different Electrode Materials

Then different electrode (In-In, Ni-Ni, Ni-In) MSM ultraviolet photodetectors were fabricated on GaN thin film which is grown on sapphier. The test results of the three electrode detectors show that the dark current of the In-In device and Ni-Ni device are in the order of 10
^-8
A and 10
^-9
A at bias of 5-10V, respectively. Asymmetric electrode (Ni-In) devices have asymmetry in dark current and a larger photo current than the symmetrical electrode devices.