Piezoelectric Micromachined Ultrasonic Transducers for Range-Finding Applications

This paper presents the basic design equations and equivalent circuit model for piezoelectric micromachined ultrasonic transducers (PMUTs) used in time-of-flight range-finding applications. A model for acoustic propagation loss is shown and compared to experimental results for a commercially-available PMUT-based time-of-flight sensor operating to a maximum pulse-echo range of 5 m.