Double-Deck Metal Solenoids 3D Integrated in Silicon Wafer for Kinetic Energy Harvesters

This paper reports a silicon-based electromagnetic (EM) kinetic energy harvester which is fabricated with MEMS and wafer-level micro-casting techniques to form the on-chip integrated 3D double-deck metal solenoids and magnet-sliding channel. The EM kinetic energy harvester collects ambient energy high-efficiently with frequency-range of 16-40Hz and the maximum power generation is 41.6u W. Moreover, the energy harvester is triggered under 2.5g ambient vibration with more than 20uW average power output, which has prospect to power electronic micro-systems.