Self-Started Piezoelectric Energy Conditioning System based on Electrostatic Driving MEMS Switch

This paper proposed a simple-structured, low cost, high-efficiency piezoelectric energy conditioning system, replacing the active electronic controllers with electrostatic MEMS switch, to decrease the intrinsic energy consumption and the complexity of the energy management circuit. With the extremely small leakage current, the average power consumption of the MEMS switch was approximately equal to as low as $1.85\times 10^{-12}\mathrm{W}$ within one charging cycle, and the highest energy conversion efficiency of 76% was obtained during testing.