A Piezoelectric MEMS Loudspeaker Lumped and FEM models

This paper presents the simulation results of a piezoelectric MEMS loudspeaker. The micro-fabricated device is composed of two wafers, the first one featuring two bending piezoelectric actuators with large displacements, and the other one featuring a mobile rigid plate surrounded by a small interstice providing a thermoviscous layer hence avoiding an acoustic short-cut between its front and back sides. The current design allows a radiated pressure of 80 dB
_SPL
from 1
kHz
at 10 cm and at 30 Volts for a 64 mm
²
footprint, which is above the known performances of the state of the art for MEMS loudspeakers with such dimensions.