Transient pull-in simulation of electrostatic microvalve with physics-based contact function

We report the fluid-structure interaction (FSI) modeling of an electrostatic actuated gas modulating microvalve. A physics-based contact function was introduced, with improved stability compared to pure penalty and augmented Lagrangian. The valve position and the transient gas flux at the inlet and outlet of the valve during the pull-in and snap-out events were simulated, showing voltage hysteresis and distinct flow patterns between the two events.