Space Charge Data Analysis for Thermal Pulse Method

In this work, a direct space charge calculation method for thermal pulse method data analysis is proposed. Combining the equation of temperature in the tested film with the heat conduction equation, the Fredholm integral equation of the first kind with the direct goal of space charge distribution in the frequency domain is deduced. This ill-posed equation is solved by approximation algorithm with some numerical examples in this study. The simulation results show that the new data analysis method is able to reduce unreasonable oscillations in great extent. The distinct low sensitivity to the deliberately added noise for calculating space charge profiles is found as another advantage of the method. The related fast and effective calibration method is also suggested for space charge measurement and the subsequent calibration method for electric field profiles with or without applied field.