Integrated Scheduling of Jobs, Reticles, Machines, AMHS and ARHS in a Semiconductor Manufacturing

This paper studies simultaneous scheduling of production and material transfer in the semiconductor photolithography area. In particular, jobs are transferred by a material handling system that employees a fleet of vehicles. Reticles serving as an auxiliary resource are also transferred from one place to another by a different set of vehicles. The extremely complex scheduling problem that includes jobs, reticles, machines, and two different sets of vehicles is (apparently) studied for the first time. A novel constraint programming model is proposed.