Micro Hemispherical Resonators with Quality Factor of 1.18 Million Fabricated Via Laser Ablation

This paper demonstrates a micro hemispherical resonator with quality factor (Q) of 1.18 million fabricated from ultrafast laser ablation. The fused silica shell structures formed by micro glassblowing are detached from the substrate via ultrafast laser ablation. Attribute to the unrestricted 3D structuring capability of laser ablation, 3D resonators with teeth-like tines along the perimeter have been fabricated. The tines are designed for simplifying the mechanical trimming and increasing the device sensitivity. The resonator exhibits n=2 wineglass mode of 4343.7 Hz and Q of 1.18 million. This is the first time to achieve Q over millions for mechanical resonators fabricated from ultrafast laser ablation, exhibiting the potential application of ultrafast laser in fabrication of high-performance MEMS devices.