A High-Frequency Tunable Piezoelectric MEMS Scanner for Fast Addressing Applications

We present a high-frequency, tunable, piezoelectric MEMS resonant scanner producing an optical scan angle of more than 2° at frequencies above 100 kHz, with non-contact frequency tuning capabilities. The device is fabricated using a cost-efficient multiuser silicon-on-insulator (SOI) process. The scanner uses thin-film piezoelectric aluminium nitride actuators to drive out-of-plane rotation of a 200 μm diameter mirror plate through mechanical coupling stages. Up to 3.6 kHz frequency tuning is achieved through on-chip thermally actuated non-contact beam tips placed adjacent to the scanner. The scanner is intended for use in small-scale, fast optomechanical applications requiring careful synchronization through frequency tuning.