Development of Flexible Haptic Device Based on Ultra-Thin PZT/Silicon Vibrator Array

This paper describes the development and evaluation of a flexible haptic device using an ultra-thin vibrator. Since the vibrator is extremely thin (Thickness: 7.26μm), it is possible to realize a flexible haptic device. As a result of the fundamental evaluation experiment, a maximum displacement of 50.3 μm was obtained at 30V. Also, the result agrees well with the simulated result. In the results of the demonstration experiment, the correct answer rate was 97.5% in the blind test in the actuation pattern of a flexible haptic device. From this result, it was demonstrated that the device can be operated as a haptic device.