A Compact Multi-layer Silicon Platelets Rectangular to Circular Waveguide Transition

This paper proposes a compact waveguide transition structure, which converts rectangular TEio mode to circular TE
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mode. This waveguide transition is composed of multi-layer silicon platelets fabricated by deep reactive ion etching (DRIE) process. As an example, a waveguide transition worked at44 GHz is designed. The total length of this waveguide transition is only 1.92 mm. Simulation results show the conversion efficiency of TE
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to TE
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mode is more than 98% in the frequency range from 32 GHz to 49 GHz, corresponding to a return loss better than 14.5 dB. Furthermore, the fractional bandwidth with better than 20 dB return loss is about 14% centered near 44 GHz.