External multi-fluid disturbance analysis of SAW micro-pressure sensor

Surface acoustic wave (SAW) micro-pressure sensor, which is a microelectronic integrated sensor, has important research significance for measuring microclearance pressure. In this paper, a coupling model of SAW sensor and fluid is analyzed using the finite element method. Simulation experiments show the influence of three different fluid actions on sensor data measurement. When the frequency range is 0~300MHz, and the temperature of heat transfer fluid field is 293.15K, the propagation displacement of SAW is under influence. The model is helpful to solve the nonlinear disturbance of the external fluid to the SAW propagation process, and can make the subsequent correction compensation for the SAW measurement system.