Using Photodiodes and Inductive Sensors in the Automated Control System and Management Quality when Processing Tools in a Glow Discharge

Questions are considered improvement of effectiveness control of the plasma generator glow discharge based on inclusion in the control system photodiodes and induction sensors for ensuring the necessary quality processing tools. The proposed approach allows implement for the most effective operational management fast-moving processes, flowing in plasma glow discharge taking into account their optimization. Developed by an additional device for the control system, allowing for the complex structure of internal links in glow discharge when processing tools.