Design and Analysis of a 3-DOF Damped Flexure-Guided Nanopositioning Stage

This paper develops a novel 3-DOF damped flexure-guided nanopositioning stage for the need for highspeed and high-frequency positioning or manipulation, which embeds three damped two-axis axially-collocated (2-AC) flexure hinges. The damped 2-AC flexure hinge is design in a compact style owing to embedding a hybrid damping structure. With the defined parameters of the stage, the motion coupling is modeled analytically. By virtue of finite element analysis, we evaluate the static and dynamic performance of the damped XYZ nanopositioning stage, including the stiffness and damping performances. The results indicate that the presented 3-DOF damped piezo-driven nanopositioning stage has stronger resonance-suppressing performance.