Proposal for a rotary micromotor structure based on CMOS-MEMS technology

This paper shows a design proposal for a MEMS rotary micromotor based on the design rules of the 0.5 micron CMOS technology of On Semiconductor. With simulations carried out in COMSOL, the electrostatic behavior of the proposed micromotor is shown; the simulation helps us to know the maximum friction force that our design is capable of overcoming when the micromotor is powered with 18 volts.