A CMUT receiving probe with an integrated preamplifier for through-transmission scanning acoustic tomography

A capacitive micromachined ultrasound transducer (CMUT) receiving probe with an integrated preamplifier was applied for through-transmission scanning acoustic tomography (SAT). The high-frequency response of the probe is improved by integrating the CMUT and preamplifier closely on the same circuit board. The integrated CMUT probe is more sensitive than a nonintegrated one in the high-frequency range of waves transmitted through an acrylic plate and a ball grid array (BGA) package.