An Equivalent Model for Lateral Modes on the H2 Response of Bulk Acoustic Wave Resonators

An equivalent circuital model is proposed for the lateral modes of a BAW resonator. It is based in the Mason model, adding a dispersive a transmission line to model the Lamb waves along the lateral dimensions of the resonator. The lateral perturbation of the longitudinal strain is added into the nonlinear constitutive relations. Validation of the model is performed with H2 measurements of Type I rectangular SMR devices.