Zig-zag ScAlN multilayer SMR for high power BAW fileter application such as RF base station

RF filters for the base station require higher power durability than those for the mobile devices. Dielectric cavity resonator filters commonly used for the base station have high power durability, however the size of those filters is large. c-Axis zig-zag multilayer SMR is one of the solutions to this problem. In this study, we reported the c-axis zig-zag 12-layer ScAlN film stack on the Bragg reflector. c-Axis zig-zag ScAlN multilayer strcture was observed by scanning electron microscopy. The 12th quasi shear mode resonance excitation was clearly observed. We evaluated durability of multilayer and single layer.