Low-k PZT film for commercial use

Monocrystalline-like epitaxial PZT films for commercial use are described for piezoelectric MEMS applications. Films at the morphotropic phase boundary (MPB) with a thickness of 1 µm to 2 µm exhibit a typical transverse piezoelectric d
₃₁
coefficient of −185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. The figure-of-merit for MEMS device is more than 50 GPa. These films are commercially available for piezoelectric MEMS device development and production.