Energy Spectrum Analysis for Optimal Design of Ultra-High Frequency (UHF) Piezoelectric Resonators Leveraging 3D FEA Domain Decomposition Method with Cloud HPC

RF filter application requires high Q resonator to meet the necessary performance specifications. To achieve high Q resonators, analysis of electrical, mechanical properties for the Surface Acoustic (SAW) and Bulk Acoustic (BAW) mode and its harmonics are required to assess loss mechanisms to optimize device behavior. In this paper, we present a time domain (TD) method that can be used to extract frequency domain (FD) energy spectra. TD approach coupled with domain decomposition and cloud HPCs allows for efficient analysis of large (~billion DOF) devices. TD method provides a quantitative insight on the energy spectrum associated with modes and the corresponding Q-factor values for the main resonance modes and its harmonics.