The Effect of Emission Processes on the Properties of Magnetron Discharge with Injection of A Beam of Accelerated Ions

The effect is considered of an ion beam injected along the axis of the anode electrode of a planar magnetron on the ignition of an abnormal low-pressure glow discharge in a magnetron. The properties have been determined of the discharge ignition at pressure of
$< 8\cdot 10^{-2}$
Pa and the properties of a planar magnetron when the magnetron cathode is irradiated by an argon ion beam. It has been established that the discharge ignition voltage decreases with increase of ion energy and threshold depends on the ion beam current. The prospect of expanding the functionality of planar magnetrons by matching the sputtering modes of the central anode with an ion beam and the magnetron cathode by plasma ions of an anomalous glow discharge is shown.