Application of High Power Impulse Magnetron Sputtering (HIPIMS) Technology for Deposition of Protective Coatings

The effects of using of the HIPIMS technology for deposition of coatings for various purposes, including CrB, TiAlNiC, and MoHfSiB, are studied. Ceramic targets obtained by self-propagating high-temperature synthesis were used for sputtering. It is shown that the transition from DC to HIPIMS modes increases the structure density, hardness, elastic-plastic properties, wear and corrosion resistance, cracking resistance during thermocycles, and oxidation resistance of the coatings. The adhesive strength can be significantly increased if preliminary ion cleaning of substrates is used.