Importance of modal analysis in vibratory microgyroscopes

In this paper some considerations regarding vibratory MEMS gyroscopes principle of operation and physical quantities which are related to vibrations are considered. Because this type of device uses energy comes from vibrations and transfers this energy with rotation presence to sensor, it is interesting how it behaves for different dimension parameters including geometrical dimensions. This work presents results of analysis eigenfrequency for all motion direction under different dimensions values.