Notes on Radiofrequency and Plasma Coupling in Inductive Plasma Ion Sources

In the vast literature on waves and plasma interaction, the skin depth, the stochastic heating and the radiofrequency (rf) magnetic field effects emerge as important factors in simulations, still relying on effective collision rate models: a closed form and universal graph are given for stochastic heating. A simulation code based on iteration between plasma and rf calculations is recalled, and typical results are shown, for a simple induction ion source design.