Laser-machined substrate technology (LMST) for Q-band applications

A three-steps laser micro-machined manufacturing technology (LMST) based in low-loss Alumina substrates is introduced and studied. As a consequence of this analysis, fabrication constraints are identified and design rules introduced in order to assist the conception of millimeter-wave passive devices for Q-band applications. Quality factor around 690 is measured at 42 GHz in resonators fabricated with this technology. Moreover, diverse devices are designed with the design rules proposed. Manufactured devices show good repeatability and balance between performance and size.