A Zero Standby Power MEMS Switch-based Infrared Sensor with Frequency Output

This paper reports on the first demonstration of an Infrared (IR) sensor based on a micromechanical photoswitch (MP) with frequency-based IR power measurement capability. By leveraging the event-driven narrowband infrared (IR) sensing capability of an MP and an integrated thermal feedback mechanism, we show for the first time a zero standby power IR sensor that can not only detect above-threshold IR power levels (> 600 nW), but also generate a pulse waveform whose frequency (range: 0.58 Hz to 5.34 Hz) is a function of the incident IR power level. The unique capability of zero power detection and variable AC waveform generation from a DC input signal (IR radiation) without additional electronics paves the way for a new class of long-lasting, maintenance-free microdevices with potential applications in large-scale remote IoT sensor networks, biomedical implants and microrobotics.