A New Flexure-based Parallel Laser Deflection Device for MicroLED Repair

A single MicroLED chip is only 30 microns in size, and a 50-inch MicroLED display panel has up to 24 million display chips. How to achieve such a huge number, such a small size and such a high density of display panels? The precise repair of each MicroLED dead-point chip is a key technology to improve the production yield of MicroLED display panels and reduce production costs. In this paper, a three-legged deflection device is innovatively designed by utilizing the advantages of large travel and low crosstalk driven by piezoelectric ceramic nano-positioning. The device is designed based on a bridge-type flexible amplification mechanism and incorporates a diamond-shaped vibration suppression device as the first guarantee for image stabilization. The device is modeled by kinematics, including the determination of output stiffness, working space and response time. A series of optimizations are carried out on the mechanism by using related optimization algorithms and control variable methods. Finally, ANSYS Workbench is used to analyze and evaluate the optimized mechanism. After theoretical analysis and simulation verification, the design finally determines that the amplifying mechanism is a bridge-type amplifying mechanism based on an elliptical flexible hinge. The deflection device can finally amplify the displacement by 15.59 times, provide a deflection range of 7.85 mrad, and the first-order natural frequency of the overall mechanism Reached 96.91Hz.