The Way of Adjusting Balance for Single Axis Air Bear Table Based on Mathematical Modeling

This paper proposes a mathematical method to calculate unbalanced condition for single axis air bearing table (SAABT). When SAABT is unbalanced, it will move like a pendulum. According to the motion of the pendulum, the mathematic model of SAABT system is built and the unbalanced torque size can be derived. Due to the unbalanced torque size is confirmed, the balance can be adjusted by putting corresponding size mass block on the load plate. At last, the specific steps about adjusting balance are list and the way above is verified by experiments. This method of adjusting balance has lots advantages, such as simple operation and high efficiency.