Design and analysis of a 3 DOF nano-positioning stage

In the super-resolution optical microscopy system, it is necessary to control the precise displacement of the sample with the 3 DOF nano-positioning stage, and to realize the two dimensional scanning imaging and the three-dimensional slice imaging. In this paper, through the design and simulation analysis of the flexible hinge structure, the precision machining and assembling of the stage, the development of the 3 DOF nano positioning stage is realized. Firstly, analyze the principle of flexible hinge, mechanism design and analysis, carry out research and structure; selection of piezoelectric ceramic actuator and capacitive displacement sensor; then, by flexible hinge processing, detection and alignment; finally, assembly is completed in the experimental verification. The experimental results show that the 3 DOF nano-positioning stage can achieve a stroke of 30µmx30µmx10µm, the minimum step is 5nm, which can meet the requirements of the super resolution micro optical system.