Wavy Cantilever RF-MEMS Switch based on Bidirectional Control of Intrinsic Stress

This work reports on the design and modelling of wavy cantilever type series MEMS switches for RF applications. We demonstrate the self-assembly based on bi-directional control of intrinsic stresses in cantilever type MEMS switches to reshape the conventional straight cantilever beams into out-of-plane wavy structures. Wavy switch structures, as opposed to traditional cantilever switches, offer simultaneous optimization for RF-isolation and pull-in voltage. Various switch structures varying in geometry were designed and modelled using coupled multi-physics simulation tools which revealed high RF-isolation for proposed switch topologies without affecting the pull-in voltage values significantly. The novel switch designs reported herein achieve RF isolation and insertion loss values of greater than 25 dB and lower than 0.35 dB, respectively, with an actuation voltage of below 11 V for frequencies up to 40 GHz.