On line measurement of vacuum degree based on continuous terahertz wave technology

This paper briefly describes the imaging principle, characteristics, development and application direction of THz continuous wave imaging technology. The theoretical basis of continuous wave terahertz technology applied in vacuum degree on-line monitoring is analyzed, and two vacuum bubbles with different vacuum degrees are used for experimental comparison. The experimental results show that with the change of vacuum degree, the signal amplitude attenuation and time delay of THz spectrum will change regularly. It shows that the spectrum and absorption spectrum obtained by THz imaging technology can sensitively distinguish the change of pressure in vacuum environment, that is, the change of vacuum degree.