Reliability Characterization for 12 V Application Using the 22FFL FinFET Technology

The 22FFL technology developed for operation to 3.3V is used to investigate process and design considerations required to extend technology capability to 12 V applications. A prototype chip was carefully designed in close consideration with the technology reliability requirements of the lower voltage components to demonstrate product-level reliability capabilities. The reliability of components such as transistors, well junctions, back-end dielectrics and MIMCAPs is thoroughly characterized and proven robust throughout a 10-year lifetime. The results demonstrate a reliable technology capability that is compliant with industrial standards to enable high-voltage design requirements.