Study on Non-destructive Measurement Method of Contact Sheet Resistance for Graphene Film

Graphene film materials have a wide range of applications. The accurate and non-destructive measurement of the sheet resistance plays an important role in the graphene application. The probe of traditional four-probe resistance measuring instruments is made of hard metal materials, which probably result in mechanical damage of graphene in the measurement processing. Besides, the accuracy and reproducibility are also poor. In this paper, conductive rubber was used as a probe due to their flexibility and conductivity. The mechanical damage of the probe to the graphene film and other film materials can be effectively avoided, and the repeatability and reproducibility of the sheet resistance measurement data can be obtained. This provides an alternative technique to measure the sheet resistance of fragile thin film materials.