Review of Rear Surface passivation in Passivated Emitter Rear Cell(PERC) using Different Process Technologies

Passivated Emitter Rear Cell (PERC) is having the market share of 10% but expected to increase 35% in next few years in solar cell production. Rear surface passivation materials and their relevant technologies are reviewed in this paper. Material with prime attention is on development of rear surface using AlOx/SiNy layer stack using different fabrication technologies. Out of which Plasma Enhanced Chemical Vapour Deposition (PECVD) technique is mostly used because of it gives good surface passivation.