Hydrogen Proton Induced HTRB Reliability Degradation in Trench Power Devices

The failure mechanism of High Temperature Reverse Bias (HTRB) in trench-based power devices is very complex and uncovering the root cause is often time-consuming and resource-intensive. In this paper, we had successfully determined the origin of HTRB failure, which is hydrogen proton (H+) and shown two possible methods to improve H+ blocking efficiency