High-Sensitive Sensors Based on QCR for Smart Devices

Quartz crystal bulk acoustic wave (BAW) resonators reached with unique characteristics that allow us to use them in both oscillators and filter schemes. Smart sensors based on BAW quartz crystal resonators used for pressure, humidity, and temperature measuring. To extend the functionality of such device sensors construction with a modulated inter-electrode gap used. Two basic designs for multicore BAW sensors with a modulated inter-electrode air- gap are developed and proved. The model to describe the parameters of the equivalent circuit of devices presented, and modeling carried out. The resulting devices have improved characteristics for special applications.