Towars Portable Mems Mass Spectrometer

This paper presents the concept of a MEMS mass spectrometer, which integrates all necessary modules on a single vacuum-sealed chip: a high vacuum micropump, a sample injection system, an ion source, an analyzer and a detector. Our MEMS mass spectrometer chip is fabricated using monocrystalline silicon and borosilicate glass substrates has dimensions of 10 × 10 × 35 mm
³
and internal volume of 0.45 cm
³
.