Ultra-high Efficient Integrated Microchannel Cooling for Multi-unit Microsystems

An ultra-high efficient single-phase silicon microchannel cooler is presented. Heat flux of 707.6W/cm
²
can be dissipated with extremely low coolant flow rate of 45ml/min. Moreover, the presented cooler can simultaneously cool four individual heaters effectively and uniformly. This work may help to address the thermal issue and improve the reliability of multi-unit microsystems.