RF Switch Squeeze Film Damping Analysis and Input Shaping Control

Gas damping plays a dominant role in damping effect of MEMS devices rather than the others damping, because the characteristic size of MEMS is several micrometers. This paper simulates and analyzes the gas pressure and squeeze film damping of high-speed moving RF switch, and finds that gas damping can be neglected to simplify model complexity and control complexity. Input shaping control based on energy conservation can decrease the responding time and restrain the bounce effect. However, when the damping force was taken into account or parameter uncertainty of the model is exit, the input shaping control based on energy conservation should be adjusted accordingly.