Formation of New Nanostructures and Their Optical Properties under the Influence of High Pressure and Laser Irradiation

The influence of pulsed laser radiation on the optical and structural properties of CNx:H on glass substrates depending on the intensity of I laser pulses are investigated. The irradiation was carried out at the core frequency of Nd3+:YAG laser (λ = 1.064 μm, tp = 10 ns) in the modulated Q-mode. The start of structural changes CNx:H under the pulsed laser radiation is determined by the indirect light detection spectroscopy. It is established that to anneal the films in an isopropanol solution takes much lower laser irradiation intensity than the one for films in the air. The possibility of reducing the amorphous phase and increasing the crystalline phase of CNx:H films with pulsed laser annealing is shown.