Design and Control of a Decoupled Micro-positioning Stage Using Corrugated Flexure Units

An XY decoupled micro-positioning stage is designed which is constructed with eight pieces of corrugated flexure (CF) beams. The stage is actuated by noncontact force provided by electromagnetic actuators. Staircase signal is applied to eliminate the residual vibration. A polynomial is used to represent the nonlinear characteristic of the experimental system accurately, and the feedforward voltage compensation strategy is adopted to reduce the negative effect caused by hysteresis loop. A prototype has been built and experiments are set up to test the design and analysis. The results show that the moving range can achieve ±700 μm and the relative errors between theoretical and experimental values are within 4%.