H2S Sensor Based on MEMS Hotplate and on-Chip Growth of CuO-SnO2 Nanosheets for High Response, Fast Recovery and Low Power Consumption

This paper reports a new pulse heating strategy for H
₂
S sensor to fasten the recovery process at low power consumption. An in-plane micro-hotplate was designed and fabricated with MEMS technology, and the sensing materials of CuO-SnO
₂
nanosheets were directly deposited with on-chip growth process, which shows excellent compatibility. Using the pulse heating strategy with micro hotplate, we have taken both the advantages of high sensitivity at room temperature and fast recovery at high temperature.