Piezoelectric PVDF Films Enhanced by Ag@SiO2 Nanoparticles for MEMS Transducer

This paper reported a new scheme to enhance the piezoelectricity of PVDF films by introducing core-shell structure nanoparticles (Ag@SiO
₂
) into the PVDF films. Through establishing the piezoelectric transducer capacitance model, it clarified the enhancement mechanism of piezoelectricity for the PVDF-Ag@SiO
₂
composite films. Meanwhile, a set of reliable film forming process had been formed. A sustainable and enhanced output performance of about 2.87 V was produced at an optimal Ag@SiO
₂
content of 0.5 wt.%, giving over 1.59-fold enhancement to the neat PVDF films. As such, the demonstrated piezoelectric PVDF films enhanced by Ag@SiO
₂
nanoparticles could potentially serve as flexible and sensitive electromechanical materials, and provided a promising solution for a variety of MEMS sensors and energy harvesting applications.