The Model and Damping Analysis of Disk Gyroscope with (100) Single Crystal Silicon

The paper presents a MEMS disk resonator gyroscope (DRG) with (100) Single Crystal Silicon and studies about effect of resonant structure asymmetry on performance. The structural asymmetry caused by fabrication errors is characterized by mass and stiffness asymmetry. In order to simulate the asymmetry of mass and stiffness, the density and Young's modulus of 1/2 rings were set with 5%, 10%, 15%, 20% and 25% errors different from the remaining rings. The resonant frequency, thermoelastic damping and anchor loss are calculated by finite element analysis. As the result, the resonator modal and frequency split change with the asymmetry of structure, and the rise of stiffness asymmetry leads the high level of frequency split, which deteriorates dynamic performance of DRG. The anchor loss increases rapidly with the rising of the asymmetry errors. Furthermore, the thermoelastic damping is the dominant energy loss mechanism and improves as the stiffness asymmetry increases.